Ion implantation

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Synopsis: Domenii: Nuclear physics: Nuclear physics colaterale: Ion implantation:


phys_org 00409.txt

The scientists initially needed to introduce a determined number of atoms precisely into the wires using ion implantation.


www.nanotech-now.com 2015 00983.txt.txt

The method is based on an ion implantation technique, a process in which ions are accelerated under an electrical field and smashed into a semiconductor.

"Our work shows that the carbon ion implantation technique has great potential for the direct synthesis of wafer-scale graphene for integrated circuit technologies."

"Kim's method relies on ion implantation, a microelectronics-compatible technique normally used to introduce impurities into semiconductors.

Kim explained that the activation annealing temperature could be lowered by performing the ion implantation at an elevated temperature.

According to Kim, the ion implantation technique also offers finer control on the final structure of the product than other fabrication methods,

as the graphene layer thickness can be determined precisely by controlling the dose of carbon ion implantation.""Our synthesis method is controllable and scalable,


www.nanowerk.com 2015 04811.txt.txt

as it can be implemented using established ion implantation infrastructure in the semiconductor industry, "Ward said. The method uses a low energy ion gun to add small numbers of helium ions into the material after it has been produced.


www.nanowerk.com 2015 05024.txt.txt

The method is based on an ion implantation technique, a process in which ions are accelerated under an electrical field and smashed into a semiconductor.

In a paper published this week in the journal Applied Physics Letters("Wafer-scale synthesis of multi-layer graphene by high-temperature carbon ion implantation"),from AIP Publishing

Wafer-scale (4 inch in diameter) synthesis of multi-layer graphene using high-temperature carbon ion implantation on nickel/Sio2/silicon.

"Our work shows that the carbon ion implantation technique has great potential for the direct synthesis of wafer-scale graphene for integrated circuit technologies."

"Kim's method relies on ion implantation, a microelectronics-compatible technique normally used to introduce impurities into semiconductors.

Kim explained that the activation annealing temperature could be lowered by performing the ion implantation at an elevated temperature.

According to Kim, the ion implantation technique also offers finer control on the final structure of the product than other fabrication methods,

as the graphene layer thickness can be determined precisely by controlling the dose of carbon ion implantation.""Our synthesis method is controllable and scalable,


www.technology.org 2015 10075.txt.txt

as it can be implemented using established ion implantation infrastructure in the semiconductor industry, Ward said. The method uses a low energy ion gun to add small numbers of helium ions into the material after it has been produced.


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